Roots-type dry vacuum pump
Gas connection section fluororesin lining construction! Suitable for the intake of halogen-based gases and strongly acidic gases.
The "Roots-type dry vacuum pump" is a product that features fluororesin lining in the gas contact area. The thickness of the fluororesin lining is over 300μm, providing durability against halogen gases and strong acidic gases. Precision finishing allows for thick lining and extremely small clearances. It can be utilized in applications such as semiconductors, pharmaceuticals, chemicals, and high-performance materials. 【Features】 ■ Fluororesin lining in the gas contact area ■ Fluororesin lining over 300μm ■ Suitable for the intake of halogen gases and strong acidic gases *For more details, please feel free to contact us.
- Company：サーフ工業
- Price：Other
